Check out Planet of the Vampires, a 1965 Italian/Spanish science fiction horror film. It starred Barry Sullivan and Norma Bengell.
The story follows the horrific experiences of the crew members of two giant spaceships that have crash landed on a forbidding, unexplored planet. The disembodied inhabitants of the world possess the bodies of the crew who died during the crash, and use the animated corpses to stalk and kill the remaining survivors.
Markary and his crew rush to the Galliott to retrieve the Meteor Rejector. They are successful, and manage to place explosives in the ship. During a struggle with the Aurans, Dr. Karan (Fernando Villeña) and Tiona are killed. Markary and Sanya return to the Argos and manage to escape as the Galliott is destroyed. After takeoff, however, they reveal themselves to be possessed by Aurans. They ask Wes, the last survivor, to join them. Wes refuses and tries to sabotage the Meteor Rejector, but fatally electrocutes himself while doing so. Because the device has been broken beyond repair, Markary and Sanya decide to change course for a nearby planet...Earth.